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Created with Pixso. Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

ব্র্যান্ড নাম: Jietai
মডেল নম্বর: JTM-100504AD
MOQ.: 1
মূল্য: ¥800000
বিতরণ সময়: 30-60work days
অর্থ প্রদানের শর্তাবলী: T/T
বিস্তারিত তথ্য
Place of Origin:
Dongguan, Guangdong
সাক্ষ্যদান:
CE, FCC, ROHS, etc.
Type:
Ultrasonic alkaline washing+Ultrasonic acid washing+Pure water rinsing
Name:
Semiconductor Cleaning Machine
Model:
JTM-100504AD
Overall Dimensions:
12M*2M*2.8M
Cleaning Frequency:
40KHZ/80KHZ
Power:
120KW
Cleaning temperature:
60℃
Number of Tanks:
10
Packaging Details:
Packaging: Wooden case, wooden frame, stretch film. Dimensions: 12M*2M*2.8M
Supply Ability:
One unit. It will take 30 to 60 days.
পণ্যের বিবরণ
Product Introduction: Semiconductor Silicon Wafer Cleaner
A precision-engineered solution for semiconductor manufacturing, this ultrasonic cleaning system integrates multi-stage processes to achieve sub-micron level surface purity on silicon wafers—critical for maintaining device performance in advanced node fabrication (down to 5nm).
Sequential Cleaning Stages:
  • Ultrasonic Alkaline Scrubbing: Employs 40KHz-80KHz ultrasonic cavitation in alkaline bath to decompose organic contaminants, strip photoresist residuals, and dislodge macro-particles (≥1μm) from wafer surfaces and via structures. The frequency-tunable ultrasonic energy ensures uniform cleaning across 4"-12" wafer diameters, including edge exclusion zones.
  • Ultrasonic Acid Etching: Utilizes the same frequency range in acidic media to dissolve inorganic impurities—specifically metal ions (Fe, Cu, Zn) and native oxide layers (SiO₂). Cavitation micro-jets penetrate patterned features to remove embedded sub-100nm contaminants, validated by particle counter readings (≤10 particles/wafer for ≥0.1μm).
  • UPW Rinsing: Final rinse with ultra-pure water (UPW, TOC ≤5ppb) flushes residual chemistries, achieving surface resistivity ≥18.2MΩ·cm—meeting SEMI F20 standards for pre-deposition cleaning.
Process Parameters:
  • Frequency Band: 40KHz-80KHz (multi-frequency operation, selectable via HMI for contamination-specific tuning)
  • Temperature Setpoint: 60℃ (PID-controlled, ±1℃ tolerance) to optimize chemical reaction kinetics without inducing wafer warpage.
  • Material Compatibility: Wetted components in PFA (perfluoroalkoxy) and sapphire to prevent metallic ion leaching, ensuring zero cross-contamination.
Fab Integration Advantages:
  • Compatible with FOUP/SMIF pod loading for automated cassette handling, reducing human intervention
  • Cleanroom-class design (ISO 5) with HEPA-filtered exhaust to maintain Class 1 environment compliance
  • Recipe storage for 50+ cleaning protocols, adaptable to bare wafers, SOI wafers, and epi-wafers
Application: Essential for pre-litho, post-CMP, and post-etch cleaning in logic, memory, and MEMS fabrication lines.
Keywords: Semiconductor wafer ultrasonic cleaner, alkaline-acid sequential cleaning, UPW rinsing, 40-80KHz, 60℃ process, sub-micron decontamination

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 0Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 1

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 2

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 3

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 4

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 5

সম্পর্কিত পণ্য
ভালো দাম অনলাইন

পণ্যের বিবরণ

Created with Pixso. বাড়ি Created with Pixso. পণ্য Created with Pixso.
সেমিকন্ডাক্টর ক্লিনিং মেশিন
Created with Pixso. Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃

ব্র্যান্ড নাম: Jietai
মডেল নম্বর: JTM-100504AD
MOQ.: 1
মূল্য: ¥800000
প্যাকেজিংয়ের বিবরণ: Packaging: Wooden case, wooden frame, stretch film. Dimensions: 12M*2M*2.8M
অর্থ প্রদানের শর্তাবলী: T/T
বিস্তারিত তথ্য
Place of Origin:
Dongguan, Guangdong
পরিচিতিমুলক নাম:
Jietai
সাক্ষ্যদান:
CE, FCC, ROHS, etc.
Model Number:
JTM-100504AD
Type:
Ultrasonic alkaline washing+Ultrasonic acid washing+Pure water rinsing
Name:
Semiconductor Cleaning Machine
Model:
JTM-100504AD
Overall Dimensions:
12M*2M*2.8M
Cleaning Frequency:
40KHZ/80KHZ
Power:
120KW
Cleaning temperature:
60℃
Number of Tanks:
10
Minimum Order Quantity:
1
মূল্য:
¥800000
Packaging Details:
Packaging: Wooden case, wooden frame, stretch film. Dimensions: 12M*2M*2.8M
Delivery Time:
30-60work days
Payment Terms:
T/T
Supply Ability:
One unit. It will take 30 to 60 days.
পণ্যের বিবরণ
Product Introduction: Semiconductor Silicon Wafer Cleaner
A precision-engineered solution for semiconductor manufacturing, this ultrasonic cleaning system integrates multi-stage processes to achieve sub-micron level surface purity on silicon wafers—critical for maintaining device performance in advanced node fabrication (down to 5nm).
Sequential Cleaning Stages:
  • Ultrasonic Alkaline Scrubbing: Employs 40KHz-80KHz ultrasonic cavitation in alkaline bath to decompose organic contaminants, strip photoresist residuals, and dislodge macro-particles (≥1μm) from wafer surfaces and via structures. The frequency-tunable ultrasonic energy ensures uniform cleaning across 4"-12" wafer diameters, including edge exclusion zones.
  • Ultrasonic Acid Etching: Utilizes the same frequency range in acidic media to dissolve inorganic impurities—specifically metal ions (Fe, Cu, Zn) and native oxide layers (SiO₂). Cavitation micro-jets penetrate patterned features to remove embedded sub-100nm contaminants, validated by particle counter readings (≤10 particles/wafer for ≥0.1μm).
  • UPW Rinsing: Final rinse with ultra-pure water (UPW, TOC ≤5ppb) flushes residual chemistries, achieving surface resistivity ≥18.2MΩ·cm—meeting SEMI F20 standards for pre-deposition cleaning.
Process Parameters:
  • Frequency Band: 40KHz-80KHz (multi-frequency operation, selectable via HMI for contamination-specific tuning)
  • Temperature Setpoint: 60℃ (PID-controlled, ±1℃ tolerance) to optimize chemical reaction kinetics without inducing wafer warpage.
  • Material Compatibility: Wetted components in PFA (perfluoroalkoxy) and sapphire to prevent metallic ion leaching, ensuring zero cross-contamination.
Fab Integration Advantages:
  • Compatible with FOUP/SMIF pod loading for automated cassette handling, reducing human intervention
  • Cleanroom-class design (ISO 5) with HEPA-filtered exhaust to maintain Class 1 environment compliance
  • Recipe storage for 50+ cleaning protocols, adaptable to bare wafers, SOI wafers, and epi-wafers
Application: Essential for pre-litho, post-CMP, and post-etch cleaning in logic, memory, and MEMS fabrication lines.
Keywords: Semiconductor wafer ultrasonic cleaner, alkaline-acid sequential cleaning, UPW rinsing, 40-80KHz, 60℃ process, sub-micron decontamination

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 0Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 1

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 2

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 3

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 4

Semiconductor Silicon Wafer Cleaner - 40KHz-80KHz Ultrasonic Alkaline/Acid Cleaning + UPW Rinsing, 60℃ 5

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